The spin-coating process : analysis of the free boundary value problem

نویسندگان

  • Robert Denk
  • Matthias Geissert
  • Matthias Hieber
  • Jürgen Saal
  • Okihiro Sawada
  • ROBERT DENK
چکیده

In this paper, an accurate model for the spin-coating process is presented and investigated from the analytical point of view. More precisely, the spin-coatong process is being described as a one-phase free boundary value problem for Newtonian fluids in the rotational setting. The method presented is based on a transformation of the free boundary value problem to a quasilinear evolution equation on a fixed domain. The keypoint for solving the latter equation will be so-called maximal regularity approach. In order to pursue this one needs to determine the precise regularity classes for the associated inhomogenous linearized equations. This is being achieved by applying the Newton polygon method to the boundary sumbol.

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تاریخ انتشار 2009